超微力台阶仪/膜厚仪

 超微力台阶仪/膜厚仪

Stylus Surface Profilometers

简介： 

超微力台阶仪/膜厚仪Alpha-Step IQ是探针接触式表面轮廓仪(台阶仪.膜厚仪)，常用于film薄膜,厚膜thick film,FPD裂变产物探测,LCD液晶面板,TP终端处理器,CF,MEMS微型机电系太阳能,LED,光电子，统等微纳米/力领域测量

型号

• Provides advanced and customizable 2D surface profiling analysis capabilities
• Enables easy location of surface profiling measurement features via saved site image with recipe.
• Features excellent surface profiling process repeatability and reproducibility.
• Precisely determines and analyzes thin step heights, surface microroughness, and overall form error on thin film surface coatings.
• Provides sufficient vertical range for large topography variations.
• Includes multiple language support for users with a worldwide presence.
• Enables faster surface profiling analysis routines by applying saved sets of surface profiling analysis instructions.

Comprehensive Surface Profiler Solutions 
The P-16 and P-16OF (3D benchtop surface profiler), Alpha-Step IQ (2D benchtop surface profiler),HRP 350 series (high resolution surface profiler) provide comprehensive surface metrology analysis and surface topography control solutions to meet the needs of the most demanding surface profiling applications.

The Alpha-Step IQ is a state-of-the-art, stylus-based surface profiler that combines high measurement precision with versatility and economy. This third generation Alpha-Step IQ is Ideal for applications such as pilot lines and materials research, enabling fast process learning and high yields. With guaranteed 7.5 Å (1σ) or 0.1% step height repeatability and sub-angstrom

resolution, the Alpha-Step IQ provides excellent repeatability and performance

to analyze and monitor processes. This system offers the most complete suite of two-dimensional analysis features for surface topography analysis on a variety

of surfaces including wafers, MEMS, ceramics, SIMS craters, micro lenses, hard disks and displays. The system is controlled by a fast and more powerful computing platform than previous Alpha-Step IQ versions, offering networking and USB communications.

APPLICATIONS

Ideal for pilot lines, R&D, and Industrial quality processes, the Alpha-Step IQ provides all the tools necessary to analyze a variety of surfaces and applications:

ƒƒFilm Thickness/Etch

ƒƒSIMS Crater

ƒƒMEMS

ƒƒOptoelectronics

ƒƒCeramics

ƒƒIndustrial Machining

Data Storage

PRODUCT DESCRIPTION

Step Height RepeatabilityThe Alpha-Step IQ’s specified guaranteed step height epeatability makes it easier to precisely measure thin step heights, surface micro roughness, and etch depth on a wide variety of surfaces extending below 80 Å and up to 2 mm step heights. This performance is ensured by modern ultra-low-noise electronics and precision mechanical components. Stylus scanning motion provides exceptional measurement stability for extremely repeatable measurements.Powerful Data AnalysisUser-selectable filters can be applied to the scan data to separate oughness and waviness components for individual analysis. Up to 48 surface parameters can be selected for analysis. Additionally, the Alpha-Step IQ offers an array of intelligent algorithms for automatic leveling and multiple step height detection. Data can be saved or exported as ASCII, AS IQ binary, or as older generation AS-500 binary type. The Alpha-Step IQ is using the same data analysis platform used on the higher end pro

Alpha-Step超微力台阶仪/膜厚仪接触式为基础表面分析器将高测量精度与多功能性和经济。适用于各种表面，包括：半导体硅片、MEMS、微电子陶瓷、SIMS、光学表面和平面显示。Alpha-Step IQ 另外还提供了丰富的选件，如：更高的垂直测量范围、用于样品定位的更大倍率的摄象头机、集成的数据处理软件和支持多语言显示等等，以满足用户各种不同的需求。计算机化的系统更提供了联网和USB通讯的强大功能。Alpha-Step IQ 能帮助您更及时地了解工艺状况以及提高产量。以保证8…(1σ)或0.1%阶梯高度重复性和sub-angstrom决议,Alpha-Step智商表面分析器提供了很好的可重复性和性能分析和监控表面分析流程。

     超微力台阶仪/膜厚仪

• 提供先进的和可定制的2 d表面分析分析功能
• 使简单的表面分析测量的位置特性与配置通。
• 具有优良的表面分析过程可重复性和再现性。
• 高度**地确定和分析薄步骤,推导出表面,整体形状误差在薄膜表面涂料。
• 提供足够的垂直距离大地形变化。
• 包括多种语言支持用户。
• 允许更快的表面分析分析例程通过应用保存套表面分析分析指令。

欢迎来电咨询超微力台阶仪/膜厚仪0510-81819831